가스질량유량계
Mass Flow Controller(Multi gas selectable)
- Accessible PID valve tuning for best speed and stability.
- Custom valve orifice sizes: yields full-range stability.
- Control mass flow, vol. flow or pressure with one device.
- No warm-up: ready to control process flows in one second.
| 제품명 | 가스질량유량계 Mass Flow Controller (Multi gas selectable) | |||
|---|---|---|---|---|
| Model | MC Series | MCS Series | MCSS Series | MCV Series |
| Type | General | For Toxi Gas | For Toxi Gas (Cl2, SO2, HCl 포함) | For Vacuum |
| Flow Range | 0 ~ 1 slpm / 0 ~ 5 slpm | |||
| Mass Flow Accuracy at
calibration conditions |
±0.6% of reading or ±0.1% of full scale | ±0.8% of reading or ±0.2% of full scale | ||
| Operating Temperature Range | -10 to +60°C | |||
| Temperature Accuracy | ±0.75°C | |||
| Operating Pressure full scale | 145 PSIG | |||
| Pressure Accuracy | Above 1 atm: ±0.5% of reading | |||
| Typical Indication Response Time | < 10 ms | < 100 ms | ||
| Typical Warm-Up Time | <1 Second | |||
| Monochrome LCD | Simultaneously displays
mass Flow, pressure and temperature |
Simultaneously displays mass Flow,
Volumetric Flow, pressure and temperature | ||
| Mechanical Dimensions
(HxWxD) |
104.14x91.44x27.94mm / 4.1x3.6x1.1" | 121.92x172.72x38.1mm /4.8x6.8x1.5" | ||
| Gas Selectable | 98 Gas | 128 Gas (Cl2, SO2, HCl 제외) | 131 Gas (Cl2, SO2, HCl 포함) | 98 Gas |
| Communication | RS-232 | |||
Gas Select™ Preloaded Gases